Plasma electronics: applications in microelectronics device fabrication T. Makabe and Z. Petrovic
Material type: TextLanguage: English Series: Series in plasma physicsPublication details: New York Taylor and Francis 2006 Description: 339pISBN: 9780750309769DDC classification: 621.3.049.77Item type | Current library | Call number | Status | Date due | Barcode |
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Book | NISER LIBRARY | 621.3.049.77 MAK-P (Browse shelf(Opens below)) | R (REFERENCE) | 5303 |
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