Plasma electronics: applications in microelectronics device fabrication (Record no. 4115)
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000 -LEADER | |
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fixed length control field | 00561nam a2200193Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 140908s9999 xx 000 0 und d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780750309769 |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | NISER LIBRARY |
041 ## - LANGUAGE CODE | |
Language code of text/sound track or separate title | English |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3.049.77 |
Item number | MAK-P |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Makabe, T |
245 ## - TITLE STATEMENT | |
Title | Plasma electronics: applications in microelectronics device fabrication |
Statement of responsibility, etc. | T. Makabe and Z. Petrovic |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc. | New York |
Name of publisher, distributor, etc. | Taylor and Francis |
Date of publication, distribution, etc. | 2006 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 339p. |
440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
Title | Series in plasma physics |
500 ## - GENERAL NOTE | |
General note | Ref sec. |
700 ## - ADDED ENTRY--PERSONAL NAME | |
Personal name | Petrovic, Z |
Relator code | Auth. |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Book |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
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R (REFERENCE) | NISER LIBRARY | NISER LIBRARY | 09/09/2014 | 621.3.049.77 MAK-P | 5303 | 09/09/2014 | 09/09/2014 | Book |