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Plasma electronics: applications in microelectronics device fabrication

Makabe, T

Plasma electronics: applications in microelectronics device fabrication T. Makabe and Z. Petrovic - New York Taylor and Francis 2006 - 339p. - Series in plasma physics .

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ISBN: 9780750309769

Dewey Class. No.: 621.3.049.77 / MAK-P

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