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Fundamentals of microfabrication: the science of miniaturization M J. Madou

By: Madou, M JMaterial type: TextTextLanguage: English Publication details: Boca Raton CRC 2002 Edition: 2nd edDescription: 723pISBN: 9780849308260Subject(s): INTEGRATED CIRCUITS -DESIGN AND CONSTRUCTION | LASERS | MACHINING | MICROELECTRONIC PACKAGING | MICROELECTRONICSDDC classification: 621.382
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