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Fundamentals of microfabrication: the science of miniaturization

Madou, M J

Fundamentals of microfabrication: the science of miniaturization M J. Madou - 2nd ed. - Boca Raton CRC 2002 - 723p.

ISBN: 9780849308260

Subjects--Topical Terms:
INTEGRATED CIRCUITS -DESIGN AND CONSTRUCTION
LASERS
MACHINING
MICROELECTRONIC PACKAGING
MICROELECTRONICS

Dewey Class. No.: 621.382 / MAD-F

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