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Ion implantation:Basic to device fabrication Emanuele Rimini

By: Rimini, EmanueleMaterial type: TextTextLanguage: English Publication details: Boston KAP 1995 Description: 393pISBN: 9780792395201Subject(s): ION BEAM INDUCED | ION SOURCES | P-N JUNCTION AND DIODE | WAFER COOLINGDDC classification: 537.5
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