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Ion implantation:Basic to device fabrication

Rimini, Emanuele

Ion implantation:Basic to device fabrication Emanuele Rimini - Boston KAP 1995 - 393p.

ISBN: 9780792395201

Subjects--Topical Terms:
ION BEAM INDUCED
ION SOURCES
P-N JUNCTION AND DIODE
WAFER COOLING

Dewey Class. No.: 537.5 / RIM-I

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