Thin film materials technology: sputtering of compound materials Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi
Material type: TextLanguage: English Publication details: New York William Andrew Publishing 2004 Description: xiv, 518pISBN: 0815514832Subject(s): CATHODE SPUTTERING | THIN FILMSDDC classification: 539.216Item type | Current library | Call number | Status | Date due | Barcode |
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Book | NISER LIBRARY | 539.216 WAS-T (Browse shelf(Opens below)) | R (REFERENCE) | 10385 |
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