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Thin film materials technology: sputtering of compound materials

Wasa, Kiyotaka

Thin film materials technology: sputtering of compound materials Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi - New York William Andrew Publishing 2004 - xiv, 518p.

ISBN: 0815514832

Subjects--Topical Terms:
CATHODE SPUTTERING
THIN FILMS

Dewey Class. No.: 539.216 / WAS-T

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