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Low Pressure Plasmas and Microstructuring Technology

Contributor(s): Franz, Gerhard., authorMaterial type:

Computer file

Computer fileLanguage: English Publication details: Berlin, Heidelberg Springer Berlin Heidelberg 2009. ISBN: 9783540858492, 978-3-540-85849-2Subject(s): Electronics and Microelectronics, Instrumentation | Surfaces and Interfaces, Thin Films | Atomic and Molecular Structure and Spectra | Electronics | Material Science | Materials | Molecular structure | Optical and Electronic Materials | Optical materials | Surfaces (Physics)Online resources: Click here to access online

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Item type	Current library	Call number	Status	Date due	Barcode
E(electronic)-Books	NISER LIBRARY		Available		E7855

Chemistry and Materials Science (Springer-11644)

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