Low Pressure Plasmas and Microstructuring Technology
Low Pressure Plasmas and Microstructuring Technology
- Berlin, Heidelberg Springer Berlin Heidelberg 2009.
Chemistry and Materials Science (Springer-11644)
9783540858492, 978-3-540-85849-2
Electronics and Microelectronics, Instrumentation
Surfaces and Interfaces, Thin Films
Atomic and Molecular Structure and Spectra
Electronics
Material Science
Materials
Molecular structure
Optical and Electronic Materials
Optical materials
Surfaces (Physics)
Chemistry and Materials Science (Springer-11644)
9783540858492, 978-3-540-85849-2
Electronics and Microelectronics, Instrumentation
Surfaces and Interfaces, Thin Films
Atomic and Molecular Structure and Spectra
Electronics
Material Science
Materials
Molecular structure
Optical and Electronic Materials
Optical materials
Surfaces (Physics)
