Metal impurities in silicon device fabrication (Record no. 7377)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00560nam a2200205Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140908s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9483540642138 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | NISER LIBRARY |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | English |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.382 |
| Item number | GRA-M |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Graff, K |
| 245 ## - TITLE STATEMENT | |
| Title | Metal impurities in silicon device fabrication |
| Statement of responsibility, etc. | Klaus Graff |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd rev. ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Berlin |
| Name of publisher, distributor, etc. | Springer |
| Date of publication, distribution, etc. | 2000 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xv,268p. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | Sringer series in materials science |
| 500 ## - GENERAL NOTE | |
| General note | Ref sec. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | SILICON DEVICES-METAL IMPURITIES |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Book |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| NISER LIBRARY | NISER LIBRARY | 09/09/2014 | 621.382 GRA-M | 5697 | 09/09/2014 | 09/09/2014 | Book |
