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Metal impurities in silicon device fabrication

Graff, K

Metal impurities in silicon device fabrication Klaus Graff - 2nd rev. ed. - Berlin Springer 2000 - xv,268p. - Sringer series in materials science .

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ISBN: 9483540642138

Subjects--Topical Terms:
SILICON DEVICES-METAL IMPURITIES

Dewey Class. No.: 621.382 / GRA-M

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