| 000 | 00540nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a9780080446394 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a669 _bMAC-M |
||
| 100 | _aMachlin, E.S. | ||
| 245 |
_aMaterials science in microelectronics ii: the effects of structure on properties in thin films _cE.S. Machlin |
||
| 250 | _a2nd ed. | ||
| 260 |
_aAmsterdam _bElsevier _c2006 |
||
| 300 | _ax, 255p. hb. | ||
| 650 | _aMATERIALS SCIENCE IN MICROELECTRONICS | ||
| 942 | _cBK | ||
| 999 |
_c9212 _d9212 |
||