000 | 00555nam a2200193Ia 4500 | ||
---|---|---|---|
008 | 140908s9999 xx 000 0 und d | ||
020 | _a9780815520313 | ||
040 | _aNISER LIBRARY | ||
041 | _aEnglish | ||
082 |
_a539.216 _bMAR-H |
||
100 | _aMartin, Peter M | ||
245 |
_aHandbook of deposition technologies for films and coatings: science, applications and technology _cedited by Peter M. Martin |
||
250 | _a3rd ed. | ||
260 |
_aAmsterdam _bElsevier _c2010 |
||
300 | _a912p. | ||
650 | _aDEPOSITION | ||
650 | _aTHIN FILMS | ||
942 | _cBK | ||
999 |
_c8984 _d8984 |