000 00555nam a2200193Ia 4500
008 140908s9999 xx 000 0 und d
020 _a9780815520313
040 _aNISER LIBRARY
041 _aEnglish
082 _a539.216
_bMAR-H
100 _aMartin, Peter M
245 _aHandbook of deposition technologies for films and coatings: science, applications and technology
_cedited by Peter M. Martin
250 _a3rd ed.
260 _aAmsterdam
_bElsevier
_c2010
300 _a912p.
650 _aDEPOSITION
650 _aTHIN FILMS
942 _cBK
999 _c8951
_d8951