000 00549nam a2200205Ia 4500
008 140908s9999 xx 000 0 und d
020 _a9789812705426
040 _aNISER LIBRARY
041 _aEnglish
082 _a621.382
_bTSE-N
100 _aTseng, Ampere A
245 _aNanofabrication: fundamentals and applications
_cA A Tseng
260 _aSingapore
_bWS
_c2010
300 _a574p.
650 _aLITHOGRAPHY
650 _aNANOSTRUCTURED MATERIALS
650 _aNANOSTRUCTURES
650 _aSCANNING PROBE MICROSCOPY
942 _cBK
999 _c8613
_d8613