000 00628nam a2200229Ia 4500
008 140908s9999 xx 000 0 und d
020 _a9783540346128
040 _aNISER LIBRARY
041 _aEnglish
082 _a681.527.6
_bBEC-F
100 _aBechtold, T
245 _aFast simulation of electrothermal MEMS
_cT. Bechtold
250 _a1st ed.
260 _aHeidelberg
_bSpringer
_c2007
300 _axi,180p.
500 _aRef. sec
650 _aEFFICIENT DYNAMIC COMPACT MODELS
650 _aELECTRO THERMAL MEMS
650 _aFAST SIMULATION
700 _aFujita,Hiroyuki and Liepmann,Dorin
_4ed.
942 _cBK
999 _c553
_d553