000 | 00628nam a2200229Ia 4500 | ||
---|---|---|---|
008 | 140908s9999 xx 000 0 und d | ||
020 | _a9783540346128 | ||
040 | _aNISER LIBRARY | ||
041 | _aEnglish | ||
082 |
_a681.527.6 _bBEC-F |
||
100 | _aBechtold, T | ||
245 |
_aFast simulation of electrothermal MEMS _cT. Bechtold |
||
250 | _a1st ed. | ||
260 |
_aHeidelberg _bSpringer _c2007 |
||
300 | _axi,180p. | ||
500 | _aRef. sec | ||
650 | _aEFFICIENT DYNAMIC COMPACT MODELS | ||
650 | _aELECTRO THERMAL MEMS | ||
650 | _aFAST SIMULATION | ||
700 |
_aFujita,Hiroyuki and Liepmann,Dorin _4ed. |
||
942 | _cBK | ||
999 |
_c553 _d553 |