| 000 | 00561nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a9780750309769 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a621.3.049.77 _bMAK-P |
||
| 100 | _aMakabe, T | ||
| 245 |
_aPlasma electronics: applications in microelectronics device fabrication _cT. Makabe and Z. Petrovic |
||
| 260 |
_aNew York _bTaylor and Francis _c2006 |
||
| 300 | _a339p. | ||
| 440 | _aSeries in plasma physics | ||
| 500 | _aRef sec. | ||
| 700 |
_aPetrovic, Z _4Auth. |
||
| 942 | _cBK | ||
| 999 |
_c4115 _d4115 |
||