000 | 00491nam a2200193Ia 4500 | ||
---|---|---|---|
008 | 140908s9999 xx 000 0 und d | ||
020 | _a9788184894134 | ||
040 | _aNISER LIBRARY | ||
041 | _aEnglish | ||
082 |
_a621.3.049.77 _bBRO-P |
||
100 | _aBrodie, Ivor | ||
245 | _aPhysics of micro/nano-fabrication | ||
260 |
_aNew York _bSpringer _c1992 |
||
300 | _a650p. | ||
650 | _aMICROELECTRONICS | ||
650 | _aTHIN-FILM CIRCUITS | ||
700 | _aMurray, Julius J. | ||
942 | _cBK | ||
999 |
_c3777 _d3777 |