000 | 00593nam a2200193Ia 4500 | ||
---|---|---|---|
008 | 140908s9999 xx 000 0 und d | ||
020 | _a0815514832 | ||
040 | _aNISER LIBRARY | ||
041 | _aEnglish | ||
082 |
_a539.216 _bWAS-T |
||
100 | _aWasa, Kiyotaka | ||
245 |
_aThin film materials technology: sputtering of compound materials _cKiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi |
||
260 |
_aNew York _bWilliam Andrew Publishing _c2004 |
||
300 | _axiv, 518p. | ||
650 | _aCATHODE SPUTTERING | ||
650 | _aTHIN FILMS | ||
700 |
_aKitabatake, Makoto _4Auth. |
||
942 | _cBK | ||
999 |
_c2859 _d2859 |