000 00889nmm a2200265Ia 4500
008 140908s9999 xx 000 0 und d
020 _a9783642177828, 978-3-642-17782-8
040 _aNISER LIBRARY
041 _aEnglish
082 _a620.115,
_b23
245 _aFabrication and Characterization in the Micro-Nano Range
260 _aBerlin, Heidelberg
_bSpringer Berlin Heidelberg
_c2011.
500 _aChemistry and Materials Science (Springer-11644)
650 _aLaser Technology, Photonics
650 _aCharacterization and Evaluation of Materials
650 _aEngineering
650 _aMaterials Science
650 _aNanotechnology
650 _aNanotechnology
650 _aNanotechnology and Microengineering
650 _aSurfaces (Physics)
700 _aLasagni, Fernando A., editor.
856 _uhttp://dx.doi.org/10.1007/978-3-642-17782-8
942 _cEB
999 _c20194
_d20194