| 000 | 00864nmm a2200265Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a9783642129032, 978-3-642-12903-2 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a620.5, _b23 |
||
| 245 | _aDesign and Manufacturing of Active Microsystems | ||
| 260 |
_aBerlin, Heidelberg _bSpringer Berlin Heidelberg _c2011. |
||
| 500 | _aChemistry and Materials Science (Springer-11644) | ||
| 650 | _aOperating Procedures, Materials Treatment | ||
| 650 | _aEngineering | ||
| 650 | _aEngineering | ||
| 650 | _aMechatronics | ||
| 650 | _aNanotechnology | ||
| 650 | _aNanotechnology | ||
| 650 | _aNanotechnology and Microengineering | ||
| 650 | _aStructural control (Engineering) | ||
| 700 | _aButtgenbach, Stephanus., | ||
| 856 | _uhttp://dx.doi.org/10.1007/978-3-642-12903-2 | ||
| 942 | _cEB | ||
| 999 |
_c20123 _d20123 |
||