000			00953nmm a2200277Ia 4500
008			140908s9999 xx 000 0 und d
020			_a9783540858492, 978-3-540-85849-2
040			_aNISER LIBRARY
041			_aEnglish
245			_aLow Pressure Plasmas and Microstructuring Technology
260			_aBerlin, Heidelberg _bSpringer Berlin Heidelberg _c2009.
500			_aChemistry and Materials Science (Springer-11644)
650			_aElectronics and Microelectronics, Instrumentation
650			_aSurfaces and Interfaces, Thin Films
650			_aAtomic and Molecular Structure and Spectra
650			_aElectronics
650			_aMaterial Science
650			_aMaterials
650			_aMolecular structure
650			_aOptical and Electronic Materials
650			_aOptical materials
650			_aSurfaces (Physics)
700			_aFranz, Gerhard., author.
856			_uhttp://dx.doi.org/10.1007/978-3-540-85849-2
942			_cEB
999			_c19997 _d19997