| 000 | 00893nmm a2200277Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a9783540766643, 978-3-540-76664-3 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a620.44, _b23 |
||
| 245 | _aReactive Sputter Deposition | ||
| 260 |
_aBerlin, Heidelberg _bSpringer Berlin Heidelberg _c2008. |
||
| 500 | _aChemistry and Materials Science (Springer-11644) | ||
| 650 | _aChemistry, Physical organic | ||
| 650 | _aSurfaces and Interfaces, Thin Films | ||
| 650 | _aChemical engineering | ||
| 650 | _aChemistry | ||
| 650 | _aChemistry | ||
| 650 | _aCondensed Matter Physics | ||
| 650 | _aIndustrial Chemistry/Chemical Engineering | ||
| 650 | _aPhysical Chemistry | ||
| 650 | _aSurfaces (Physics) | ||
| 700 | _aDepla, Diederik., editor. | ||
| 856 | _uhttp://dx.doi.org/10.1007/978-3-540-76664-3 | ||
| 942 | _cEB | ||
| 999 |
_c19964 _d19964 |
||