000			00904nmm a2200301Ia 4500
008			140908s9999 xx 000 0 und d
020			_a9780387257860, 978-0-387-25786-0
040			_aNISER LIBRARY
041			_aEnglish
245			_aMEMS/NEMS
260			_aBoston, MA _bSpringer US _c2006.
500			_aChemistry and Materials Science (Springer-11644)
650			_aElectronics and Microelectronics, Instrumentation
650			_aChemistry
650			_aChemistry
650			_aElectronics
650			_aEngineering design
650			_aEngineering Design
650			_aMechanical engineering
650			_aMechanical Engineering
650			_aNanotechnology
650			_aNanotechnology
650			_aOptical and Electronic Materials
650			_aOptical materials
700			_aLeondes, Cornelius T., editor.
856			_uhttp://dx.doi.org/10.1007/b136111
942			_cEB
999			_c19351 _d19351