000 00953nmm a2200301Ia 4500
008 140908s9999 xx 000 0 und d
020 _a9789048125203, 978-90-481-2520-3
040 _aNISER LIBRARY
041 _aEnglish
082 _a620.0042,
_b23
245 _aMechanics and Physics of Precise Vacuum Mechanisms
260 _aDordrecht
_bSpringer Netherlands
_c2010.
500 _aPhysics and Astronomy (Springer-11651)
650 _aChemistry, inorganic
650 _aEngineering, general
650 _aSurfaces and Interfaces, Thin Films
650 _aTribology, Corrosion and Coatings
650 _aVibration, Dynamical Systems, Control
650 _aEngineering
650 _aEngineering
650 _aEngineering design
650 _aEngineering Design
650 _aSurfaces (Physics)
650 _aVibration
700 _aDeulin, E. A., author.
856 _uhttp://dx.doi.org/10.1007/978-90-481-2520-3
942 _cEB
999 _c16547
_d16547