000			00898nmm a2200265Ia 4500
008			140908s9999 xx 000 0 und d
020			_a9783540447016, 978-3-540-44701-6
040			_aNISER LIBRARY
041			_aEnglish
245			_aInfrared Ellipsometry on Semiconductor Layer Structures
260			_aBerlin, Heidelberg _bSpringer Berlin Heidelberg _c2005.
500			_aPhysics and Astronomy (Springer-11651)
650			_aApplied Optics, Optoelectronics, Optical Devices
650			_aSurfaces and Interfaces, Thin Films
650			_aChemistry
650			_aChemistry
650			_aOptical and Electronic Materials
650			_aOptical materials
650			_aPhysical optics
650			_aPhysics and Applied Physics in Engineering
650			_aSurfaces (Physics)
700			_aSchubert, Mathias., author.
856			_uhttp://dx.doi.org/10.1007/b11964
942			_cEB
999			_c15793 _d15793