| 000 | 00756nmm a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a9783540445029, 978-3-540-44502-9 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 245 | _aSputtering by Particle Bombardment | ||
| 260 |
_aBerlin, Heidelberg _bSpringer Berlin Heidelberg _c2007. |
||
| 500 | _aPhysics and Astronomy (Springer-11651) | ||
| 650 | _aAtoms and Molecules in Strong Fields, Plasma Physics | ||
| 650 | _aSurfaces and Interfaces, Thin Films | ||
| 650 | _aChemistry | ||
| 650 | _aChemistry | ||
| 650 | _aPlasma (Ionized gases) | ||
| 650 | _aSurfaces (Physics) | ||
| 700 | _aBehrisch, Rainer., editor. | ||
| 856 | _uhttp://dx.doi.org/10.1007/978-3-540-44502-9 | ||
| 942 | _cEB | ||
| 999 |
_c15788 _d15788 |
||