TY  - BOOK
AU  - Machlin, E.S.
TI  - Materials science in microelectronics ii: the effects of structure on properties in thin films
SN  - 9780080446394
U1  - 669 
PY  - 2006///
CY  - Amsterdam
PB  - Elsevier
KW  - MATERIALS SCIENCE IN MICROELECTRONICS
ER  -