TY  - BOOK
AU  - Smith, Donald L.
TI  - Thin-film deposition: principles and practice
SN  - 0070585024
U1  - 539.216 
PY  - 1995///
CY  - Boston
PB  - McGraw Hill
KW  - THIN FILM DEVICES
KW  - THIN FILMS
KW  - VAPOR-PLATING
ER  -