TY  - BOOK
AU  - Martin, Peter M
TI  - Handbook of deposition technologies for films and coatings: science, applications and technology
SN  - 9780815520313
U1  - 539.216 
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
KW  - DEPOSITION
KW  - THIN FILMS
ER  -