TY  - BOOK
AU  - Tseng, Ampere A
TI  - Nanofabrication: fundamentals and applications
SN  - 9789812705426
U1  - 621.382 
PY  - 2010///
CY  - Singapore
PB  - WS
KW  - LITHOGRAPHY
KW  - NANOSTRUCTURED MATERIALS
KW  - NANOSTRUCTURES
KW  - SCANNING PROBE MICROSCOPY
ER  -