TY  - BOOK
AU  - Madou, M J
TI  - Fundamentals of microfabrication: the science of miniaturization
SN  - 9780849308260
U1  - 621.382 
PY  - 2002///
CY  - Boca Raton
PB  - CRC
KW  - INTEGRATED CIRCUITS -DESIGN AND CONSTRUCTION
KW  - LASERS
KW  - MACHINING
KW  - MICROELECTRONIC PACKAGING
KW  - MICROELECTRONICS
ER  -