TY  - BOOK
AU  - Rimini, Emanuele 
TI  - Ion implantation:Basic to device fabrication
SN  - 9780792395201
U1  - 537.5 
PY  - 1995///
CY  - Boston
PB  - KAP
KW  - ION BEAM INDUCED
KW  - ION SOURCES
KW  - P-N JUNCTION AND DIODE
KW  - WAFER COOLING
ER  -