TY - BOOK AU - Ohring, Milton TI - Materials science of thin films:deposition and structure SN - 9788131202791 U1 - 539.216 PY - 2002/// CY - San Diego PB - Academic Press INC.( Elsevier) KW - MATERIALS SCIENCE KW - THIN FILM EVAPORATION PROCESS KW - VACCUM SCIENCE TECHNOLOGY N1 - First published in India in 2006. ER -