TY  - BOOK
AU  - Bechtold, T
AU  - Fujita,Hiroyuki and Liepmann,Dorin
TI  - Fast simulation of electrothermal MEMS
SN  - 9783540346128
U1  - 681.527.6 
PY  - 2007///
CY  - Heidelberg
PB  - Springer
KW  - EFFICIENT DYNAMIC COMPACT MODELS
KW  - ELECTRO THERMAL MEMS
KW  - FAST SIMULATION
N1  - Ref. sec
ER  -