TY  - BOOK
AU  - Makabe, T
AU  - Petrovic, Z
TI  - Plasma electronics: applications in microelectronics device fabrication
SN  - 9780750309769
U1  - 621.3.049.77 
PY  - 2006///
CY  - New York 
PB  - Taylor and Francis
N1  - Ref sec
ER  -