TY  - BOOK
AU  - Brodie, Ivor
AU  - Murray, Julius J. 
TI  - Physics of micro/nano-fabrication
SN  - 9788184894134
U1  - 621.3.049.77 
PY  - 1992///
CY  - New York
PB  - Springer
KW  - MICROELECTRONICS
KW  - THIN-FILM CIRCUITS
ER  -