TY - BOOK AU - Tompkins, HG AU - McGahan, WA TI - Spectroscopic ellipsometry and reflectometry: a user's guide SN - 9780471181729 U1 - 543.42 PY - 1999/// CY - New York PB - Wiley KW - ELLIPSOMETRY KW - MATERIALS-OPTICAL PROPERTIES KW - REFLECTOMETRY KW - THIN FILMS-OPTICAL PROPERTIES N1 - Ref. sec ER -