TY  - BOOK
AU  - Wasa, Kiyotaka
AU  - Kitabatake, Makoto
TI  - Thin film materials technology: sputtering of compound materials
SN  - 0815514832
U1  - 539.216 
PY  - 2004///
CY  - New York
PB  - William Andrew Publishing
KW  - CATHODE SPUTTERING
KW  - THIN FILMS
ER  -