TY  - DATA
AU  - Leach, Richard., editor.
TI  - Optical Measurement of Surface Topography
SN  - 9783642120121, 978-3-642-12012-1
U1  - 620.11, 
PY  - 2011///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Microwaves, RF and Optical Engineering
KW  - Surfaces and Interfaces, Thin Films
KW  - Characterization and Evaluation of Materials
KW  - Materials Science
KW  - Measurement Science and Instrumentation
KW  - Microwaves
KW  - Surfaces (Physics)
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/978-3-642-12012-1
ER  -