TY  - DATA
AU  - Franz, Gerhard., author.
TI  - Low Pressure Plasmas and Microstructuring Technology
SN  - 9783540858492, 978-3-540-85849-2
PY  - 2009///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Electronics and Microelectronics, Instrumentation
KW  - Surfaces and Interfaces, Thin Films
KW  - Atomic and Molecular Structure and Spectra
KW  - Electronics
KW  - Material Science
KW  - Materials
KW  - Molecular structure
KW  - Optical and Electronic Materials
KW  - Optical materials
KW  - Surfaces (Physics)
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/978-3-540-85849-2
ER  -