TY  - DATA
AU  - Depla, Diederik., editor.
TI  - Reactive Sputter Deposition
SN  - 9783540766643, 978-3-540-76664-3
U1  - 620.44, 
PY  - 2008///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Chemistry, Physical organic
KW  - Surfaces and Interfaces, Thin Films
KW  - Chemical engineering
KW  - Chemistry
KW  - Condensed Matter Physics
KW  - Industrial Chemistry/Chemical Engineering
KW  - Physical Chemistry
KW  - Surfaces (Physics)
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/978-3-540-76664-3
ER  -