TY  - DATA
AU  - Mahalik, Nitaigour Premchand., author.
TI  - Micromanufacturing and Nanotechnology
SN  - 9783540293392, 978-3-540-29339-2
PY  - 2006///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Operating Procedures, Materials Treatment
KW  - Surfaces and Interfaces, Thin Films
KW  - Characterization and Evaluation of Materials
KW  - Chemistry
KW  - Nanotechnology
KW  - Structural control (Engineering)
KW  - Surfaces (Physics)
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/3-540-29339-6
ER  -