TY - DATA AU - Xu, Yongdong., author. TI - Chemical Vapour Deposition SN - 9781848828940, 978-1-84882-894-0 U1 - 670, PY - 2010/// CY - London PB - Springer London KW - Materials Science, general KW - Operating Procedures, Materials Treatment KW - Engineering KW - Materials KW - Structural control (Engineering) N1 - Chemistry and Materials Science (Springer-11644) UR - http://dx.doi.org/10.1007/978-1-84882-894-0 ER -