TY  - DATA
AU  - Shacham-Diamand, Yosi., editor.
TI  - Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications
SN  - 9780387958682, 978-0-387-95868-2
U1  - 541.37, 
PY  - 2009///
CY  - New York, NY
PB  - Springer New York
KW  - Materials Science, general
KW  - Chemical engineering
KW  - Chemistry
KW  - Computer engineering
KW  - Electrical Engineering
KW  - Electrochemistry
KW  - Industrial Chemistry/Chemical Engineering
KW  - Materials
KW  - Nanotechnology
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/978-0-387-95868-2
ER  -