TY  - DATA
AU  - Alford, Terry L., author.
TI  - Fundamentals of Nanoscale Film Analysis
SN  - 9780387292618, 978-0-387-29261-8
PY  - 2007///
CY  - Boston, MA
PB  - Springer US
KW  - Electronics and Microelectronics, Instrumentation
KW  - Surfaces and Interfaces, Thin Films
KW  - Characterization and Evaluation of Materials
KW  - Chemistry
KW  - Condensed matter
KW  - Condensed Matter
KW  - Electronics
KW  - Nanotechnology
KW  - Particles (Nuclear physics)
KW  - Solid State Physics and Spectroscopy
KW  - Surfaces (Physics)
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/978-0-387-29261-8
ER  -