TY  - DATA
AU  - Leondes, Cornelius T., editor.
TI  - MEMS/NEMS
SN  - 9780387257860, 978-0-387-25786-0
PY  - 2006///
CY  - Boston, MA
PB  - Springer US
KW  - Electronics and Microelectronics, Instrumentation
KW  - Chemistry
KW  - Electronics
KW  - Engineering design
KW  - Engineering Design
KW  - Mechanical engineering
KW  - Mechanical Engineering
KW  - Nanotechnology
KW  - Optical and Electronic Materials
KW  - Optical materials
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/b136111
ER  -