TY - DATA AU - Gusev, Evgeni., editor. TI - Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators SN - 9789048138074, 978-90-481-3807-4 U1 - 660.6, PY - 2010/// CY - Dordrecht PB - Springer Netherlands KW - Microwaves, RF and Optical Engineering KW - Chemistry KW - Engineering KW - Mechanical engineering KW - Mechanical Engineering KW - Mechanics KW - Microengineering KW - Microreactors KW - Microwaves KW - Nanotechnology and Microengineering N1 - Physics and Astronomy (Springer-11651) UR - http://dx.doi.org/10.1007/978-90-481-3807-4 ER -